(19)

(11)

EP 0 815 595 A1

(12)

(43) Date of publication: 07.01.1998 Bulletin 1998/02 (21) Application number: 95944126.0 (22) Date of filing: 29.12.1995

(51) International Patent Classification (IPC):  G01J 5/ 20( . ) H01L 27/ 16( . ) G01J 5/ 34( . ) H01L 31/ 032( . ) (86) International application number: PCT/US1995/016399 (87) International publication number: WO 1996/024165 (08.08.1996 Gazette 1996/36)

(84) Designated Contracting States: DE FR GB IE NL (30) Priority: 01.02.1995 US 19950382200 22.06.1995 US 19950000424P (71) Applicant: Research Corporation Technologies, Inc Tucson, Arizona 85711-3335 (US)	(72) Inventors: BUTLER, Donald, P. Southern Methodist University Dallas, TX 75225 (US) CELIK-BUTLER, Zeynep Southern Methodist Dallas, TX 75225 (US) PAO-CHUAN, Shan Southern Methodist University Dallas, TX 75225 (US) (74) Representative: Jones, Alan John, et al  CARPMAELS & RANSFORD 43 Bloomsbury Square London, WC1A 2RA London, WC1A 2RA (GB)