(19)
(11) EP 0 818 053 A1

(12)

(43) Date of publication:
14.01.1998 Bulletin 1998/03

(21) Application number: 96906828.0

(22) Date of filing: 14.03.1996
(51) International Patent Classification (IPC): 
H01J 37/ 32( . )
(86) International application number:
PCT/GB1996/000576
(87) International publication number:
WO 1996/030928 (03.10.1996 Gazette 1996/44)
(84) Designated Contracting States:
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 31.03.1995 GB 19950006676

(71) Applicant: APPLIED VISION LIMITED
Whitwick, Leicestershire LE67 4JP (GB)

(72) Inventors:
  • WALLS, John, Michael
    Whitwick, Leicestershire LE6 3JP (GB)
  • SPENCER, Alaric, Graham
    Whitwick, Leicestershire LE6 3JP (GB)
  • WAUGH, Allen, Robert
    Whitwick, Leicestershire LE6 3JP (GB)
  • WHITE, Norman, Henry
    Whitwick, Leicestershire LE6 3JP (GB)
  • J'AFER, Hussain
    Whitwick, Leicestershire LE6 3JP (GB)

(74) Representative: Wood, Graham 
Bailey Walsh & Co, 5 York Place
Leeds LS1 2SD
Leeds LS1 2SD (GB)

   


(54) PLASMA SOURCE