SELF-ALIGNMENT TECHNIQUE FOR SEMICONDUCTOR DEVICES - Patent 0818055

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EP 0 818 055 A1

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(43)	Date of publication:
	14.01.1998 Bulletin 1998/03

(21)	Application number: 96906603.0

(22)	Date of filing: 21.02.1996

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International Patent Classification (IPC):

H01L 21/ 22^{( . )}
H01L 21/ 761^{( . )}
H01L 27/ 06^{( . )}

H01L 21/ 265^{( . )}
H01L 21/ 8249^{( . )}

(86)	International application number:
	PCT/US1996/002449

(87)	International publication number:
	WO 1996/030936 (03.10.1996 Gazette 1996/44)

(84)	Designated Contracting States:
	DE FR GB IT NL

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Priority:

27.03.1995 US 19950411368

(71)	Applicant: MICREL INCORPORATED
	San Jose, CA 95131 (US)

(72)	Inventors:
	GARNETT, Martin, E. Los Gatos, CA 95032 (US) MOYER, James, C. San Jose, CA 95129 (US) ALTER, Martin, J. Los Altos, CA 94022 (US)

(74)	Representative: Powell, Stephen David, et al
	WILLIAMS, POWELL & ASSOCIATES 34 Tavistock Street London WC2E 7PB London WC2E 7PB (GB)

(54)	SELF-ALIGNMENT TECHNIQUE FOR SEMICONDUCTOR DEVICES