SPUTTERING APPARATUS WITH ISOLATED COOLANT AND SPUTTERING TARGET THEREFOR - Patent 0824760

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EP 0 824 760 A1

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(43)	Date of publication:
	25.02.1998 Bulletin 1998/09

(21)	Application number: 95943608.0

(22)	Date of filing: 27.11.1995

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International Patent Classification (IPC):

C23C 14/ 34^{( . )}
H01L 21/ 203^{( . )}

H01J 37/ 34^{( . )}

(86)	International application number:
	PCT/US1995/015422

(87)	International publication number:
	WO 1996/036065 (14.11.1996 Gazette 1996/50)

(84)	Designated Contracting States:
	BE CH DE FR GB IT LI LU NL SE

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Priority:

11.05.1995 US 19950439490

(71)	Applicant: MATERIALS RESEARCH CORPORATION
	Orangeburg New York 10962 (US)

(72)	Inventor:
	HURWITT, Steven, D. Park Ridge, NJ 07656-1125 (US)

(74)	Representative: Robinson, Nigel Alexander Julian
	D. Young & Co., 21 New Fetter Lane London EC4A 1DA London EC4A 1DA (GB)

(54)	SPUTTERING APPARATUS WITH ISOLATED COOLANT AND SPUTTERING TARGET THEREFOR