METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR DICE - Patent 0826152

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EP 0 826 152 A1

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(43)	Date of publication:
	04.03.1998 Bulletin 1998/10

(21)	Application number: 96915407.0

(22)	Date of filing: 30.04.1996

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International Patent Classification (IPC):

G01R 31/ 26^{( . )}
G01R 1/ 073^{( . )}
H01L 21/ 60^{( . )}
H01L 21/ 68^{( . )}
H01L 23/ 498^{( . )}
G01R 1/ 067^{( . )}
H05K 3/ 00^{( . )}

G01R 1/ 04^{( . )}
G01R 31/ 28^{( . )}
H01L 21/ 66^{( . )}
H01L 23/ 13^{( . )}
H05K 3/ 40^{( . )}
G01R 3/ 00^{( . )}
H05K 3/ 42^{( . )}

(86)	International application number:
	PCT/US1996/006002

(87)	International publication number:
	WO 1996/035129 (07.11.1996 Gazette 1996/49)

(84)	Designated Contracting States:
	DE GB

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Priority:

01.05.1995 US 19950432111

(60)	Divisional application:
	06075592.3 / 1691206

(71)	Applicant: MICRON TECHNOLOGY, INC.
	Boise, ID 83706-9632 (US)

(72)	Inventors:
	WOOD, Alan, G. Boise, ID 83706 (US) FARNWORTH, Warren, M. Nampa, ID 83686 (US) AKRAM, Salman Boise, ID 83706 (US) HEMBREE, David, R. Boise, ID 83709 (US)

(74)	Representative: Smulders, Theodorus A.H.J., Ir., et al
	Vereenigde Octrooibureaux Nieuwe Parklaan 97 2587 BN 's-Gravenhage 2587 BN 's-Gravenhage (NL)

(54)	METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR DICE