(19)

(11)

EP 0 826 248 A1

(12)

(43) Date of publication: 04.03.1998 Bulletin 1998/10 (21) Application number: 96914717.0 (22) Date of filing: 20.05.1996

(51) International Patent Classification (IPC):  H01L 51/ 50( . ) H01L 51/ 52( . ) (86) International application number: PCT/US1996/007257 (87) International publication number: WO 1996/037001 (21.11.1996 Gazette 1996/51)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 19.05.1995 US 19950444998 08.11.1995 US 19950554419 (71) Applicant: UNIAX CORPORATION Santa Barbara, CA 93117 (US)	(72) Inventors: YU, Gang Goleta, CA 93117 (US) CAO, Yong Goleta, CA 93117-4012 (US) PEI, Qibing Santa Barbara, CA 93111 (US) (74) Representative: Behrens, Dieter, Dr.-Ing.  Wuesthoff & Wuesthoff Patent- und Rechtsanwälte Schweigerstrasse 2 81541 München 81541 München (DE)