(84) |
Designated Contracting States: |
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DE FR |
(30) |
Priority: |
26.05.1995 US 19950452255 21.09.1995 US 19950526246 18.10.1995 US 19950533584 09.11.1995 US 19950554902 13.11.1995 WO 1995US14909 15.11.1995 US 19950558332 05.03.1996 US 19960012878P
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(71) |
Applicant: FORMFACTOR, INC. |
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Livermore, CA 94550 (US) |
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(72) |
Inventors: |
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- KHANDROS, Igor, Y.
Orinda, CA 94563 (US)
- DOZIER, Thomas, H.
Carrolton, TX 75006 (US)
- ELDRIDGE, Benjamin, N.
Danville, CA 94523 (US)
- GARY, W., Grube
Pleasanton, CA 94588 (US)
- GAETAN, L., Mathieu
Dublin, CA 94568 (US)
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(74) |
Representative: Kahler, Kurt, Dipl.-Ing. |
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Patentanwälte Kahler, Käck, Fiener et col., Vorderer Anger 268 86899 Landsberg/Lech 86899 Landsberg/Lech (DE) |
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