ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROFLUORIC ACID FOR SEMICONDUCTOR PROCESSING - Patent 0833705

(19)

(11)

EP 0 833 705 A1

(12)

(43)	Date of publication:
	08.04.1998 Bulletin 1998/15

(21)	Application number: 96919223.0

(22)	Date of filing: 05.06.1996

(51)

International Patent Classification (IPC):

B01D 15/ 04^{( . )}
C01C 1/ 02^{( . )}
H01L 21/ 304^{( . )}
H01L 21/ 311^{( . )}

C01B 7/ 19^{( . )}
C01C 1/ 16^{( . )}
H01L 21/ 306^{( . )}

(86)	International application number:
	PCT/US1996/009554

(87)	International publication number:
	WO 1996/041687 (27.12.1996 Gazette 1997/04)

(84)	Designated Contracting States:
	DE FR GB IT NL

(30)

Priority:

05.06.1995 WO 1995US07649
07.07.1995 US 19950038711P

(71)	Applicant: STARTEC VENTURES, INC.
	Fallbrook, CA 92028 (US)

(72)	Inventors:
	HOFFMAN, Joe, G. Cardiff, CA 92007 (US) CLARK, R., Scot Fallbrook, CA 92028 (US)

(74)	Representative: Daniels, Jeffrey Nicholas, et al
	Page White & Farrer 54 Doughty Street London WC1N 2LS London WC1N 2LS (GB)

(54)	ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROFLUORIC ACID FOR SEMICONDUCTOR PROCESSING