......DE....FRGB..IT....NL..........................................................................*EPregister to ST.36 EBD process v 1.0 kbaumeister@epo.org (15 Jan 2013)0836524A119980422EP96918351.01996060519980105enenen1995US0764919950605WO19950017123P19950707US1998042219981719980422199817

B08B 3/ 02 A I

B01D 15/ 04 A I

B01J 39/ 04 A I

C01B 7/ 07 A I

C01B 7/ 19 A I

C01B 15/ 013 A I

C01C 1/ 02 A I

C01C 1/ 16 A I

H01L 21/ 304 A I

H01L 21/ 306 A I

H01L 21/ 311 A I

enON-SITE GENERATION OF ULTRA-HIGH-PURITY BUFFERED HF FOR SEMICONDUCTOR PROCESSINGfrGENERATION SUR SITE DE PEROXYDE D'HYDROGENE TAMPONNE A PURETE ULTRA-HAUTE POUR LE TRAITEMENT DE SEMI-CONDUCTEURSdeERZEUGUNG VOR ORT VON ULTRAHOCHREINEM GEPUFFERTEM WASSERSTOFFPEROXID FÜRDIE HALBLEITERVERARBEITUNG.STARTEC VENTURES, INC.1327 Farrand RoadFallbrook, CA 92028USHOFFMAN, Joe, G.Suite F, 2140 Orinda DriveCardiff, CA 92007USCLARK, R., Scot1327 Farrand RoadFallbrook, CA 92028USDaniels, Jeffrey Nicholas, et alPage White & Farrer 54 Doughty StreetLondon WC1N 2LSGBDEFRGBITNLUS199600955619960605enWO199603923719961212199702