SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING - Patent 0836719

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EP 0 836 719 A1

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(43)	Date of publication:
	22.04.1998 Bulletin 1998/17

(21)	Application number: 96919439.0

(22)	Date of filing: 05.06.1996

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International Patent Classification (IPC):

G05D 11/ 03^{( . )}
C01C 1/ 02^{( . )}
H01L 21/ 306^{( . )}

C01B 7/ 19^{( . )}
C01C 1/ 16^{( . )}
H01L 21/ 311^{( . )}

(86)	International application number:
	PCT/US1996/010389

(87)	International publication number:
	WO 1996/039651 (12.12.1996 Gazette 1997/02)

(84)	Designated Contracting States:
	DE FR GB IT NL

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Priority:

05.06.1995 WO 1995US07649
07.07.1995 US 19950018104P
08.03.1996 US 19960017828P

(71)	Applicant: STARTEC VENTURES, INC.
	Fallbrook, CA 92028 (US)

(72)	Inventors:
	HOFFMAN, Joe G. Cardiff, CA 92007 (US) CLARK, R., Scot Fallbrook, CA 92028 (US) JONES, Allen, H., Jr. Scottsdale, AZ 85259 (US)

(74)	Representative: Vesin, Jacques, et al
	L'AIR LIQUIDE, S.A., Service Propriété Industrielle, 75 quai d'Orsay 75321 Paris Cédex 07 75321 Paris Cédex 07 (FR)

(54)	SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING