(19)

(11)

EP 0 838 094 A1

(12)

(43) Date of publication: 29.04.1998 Bulletin 1998/18 (21) Application number: 97916524.0 (22) Date of filing: 09.04.1997

(51) International Patent Classification (IPC):  H01L 31/ 0216( . ) (86) International application number: PCT/GB1997/000986 (87) International publication number: WO 1997/038449 (16.10.1997 Gazette 1997/44)

(84) Designated Contracting States: DE ES FR GB IT (30) Priority: 10.04.1996 GB 19960007400 (71) Applicants: TAYLOR HOBSON LIMITED Leicester LE4 9JQ (GB) Semelab plc Lutterworth, Leicestershire LE17 4JB (GB)	(72) Inventors: MANSFIELD, Daniel Leicester LE2 3LS (GB) PULHAM, Richard Bitterne, Southampton SO19 4DT (GB) BISHTON, Stephen Poole, Dorset BH15 4JZ (GB) (74) Representative: Beresford, Keith Denis Lewis, et al  BERESFORD & Co. 2-5 Warwick Court High Holborn London WC1R 5DJ London WC1R 5DJ (GB)