A METHOD FOR THE LOW TEMPERATURE CLEANING OF SUBSTRATES CONTAINING INDIUM OR ANTIMONY - Patent 0842531

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EP 0 842 531 A1

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(43)	Date of publication:
	20.05.1998 Bulletin 1998/21

(21)	Application number: 96925907.0

(22)	Date of filing: 01.08.1996

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International Patent Classification (IPC):

H01L 21/ 306^{( . )}

(86)	International application number:
	PCT/GB1996/001864

(87)	International publication number:
	WO 1997/006555 (20.02.1997 Gazette 1997/09)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

03.08.1995 GB 19950015902

(71)	Applicant: THE SECRETARY OF STATE FOR DEFENCE
	Farnborough, Hampshire GU14 6TD (GB)

(72)	Inventors:
	WHITAKER, Timothy, John Defence Research Agency Malvern Worcs. WR14 3PS (GB) MARTIN, Trevor Defence Research Agency Malvern Worcs. WR14 3PS (GB) JOHNSON, Andrew, David Defence Research Agency Malvern Worcs. WR14 3PS (GB) FREER, Richard, William Defence Research Agency Malvern Worcs. WR14 3PS (GB)

(74)	Representative: Skelton, Stephen Richard
	D/IPR (DERA) Formalities Poplar 2a MOD (PE) Abbey Wood #19 P.O. Box 702 Bristol BS12 7DU Bristol BS12 7DU (GB)

(54)	A METHOD FOR THE LOW TEMPERATURE CLEANING OF SUBSTRATES CONTAINING INDIUM OR ANTIMONY