STRAIGHT LINE WAFER TRANSFER SYSTEM - Patent 0843640

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EP 0 843 640 A1

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(43)	Date of publication:
	27.05.1998 Bulletin 1998/22

(21)	Application number: 96921694.0

(22)	Date of filing: 20.06.1996

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International Patent Classification (IPC):

B65G 1/ 00^{( . )}
H01L 21/ 677^{( . )}

B65G 49/ 07^{( . )}
H01L 21/ 687^{( . )}

(86)	International application number:
	PCT/US1996/010601

(87)	International publication number:
	WO 1997/003004 (30.01.1997 Gazette 1997/06)

(84)	Designated Contracting States:
	DE FR GB IE IT NL

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Priority:

07.07.1995 US 19950000963
22.05.1996 US 19960651724
22.05.1996 US 19960651395

(71)	Applicant: Pri Automation, Inc.
	Billerica, MA 01821-3986 (US)

(72)	Inventors:
	WIESLER, Mordechai Lexington, MA 02173 (US) WEISS, Mitchell Haverford, PA 19041 (US)

(74)	Representative: Hofstetter, Alfons J., Dr.rer.nat., et al
	Strasse & Hofstetter, Balanstrasse 57 81541 München 81541 München (DE)

(54)	STRAIGHT LINE WAFER TRANSFER SYSTEM