(19)
(11) EP 0 846 932 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
20.12.2000 Bulletin 2000/51

(43) Date of publication A2:
10.06.1998 Bulletin 1998/24

(21) Application number: 98101571.2

(22) Date of filing: 28.10.1994
(51) International Patent Classification (IPC)7: G01B 7/34, G02B 21/00
(84) Designated Contracting States:
DE FR GB

(30) Priority: 05.11.1993 JP 27670893

(62) Application number of the earlier application in accordance with Art. 76 EPC:
94117120.9 / 0652414

(71) Applicant: SEIKO INSTRUMENTS INC.
Chiba-shi, Chiba 261 (JP)

(72) Inventors:
  • Chiba, Norio
    Mihama-ku, Chiba-shi, Chiba 261 (JP)
  • Muramatsu, Hiroshi
    Mihama-ku, Chiba-shi, Chiba 261 (JP)

(74) Representative: Fleuchaus, Leo, Dipl.-Ing. et al
Melchiorstrasse 42
81479 München
81479 München (DE)

   


(54) Scanning near-field optic/atomic force microscope


(57) The present invention relates to a scanning near-field optic/atomic force microscope adapted to observe topography and optical characteristics of a sample (13), said microscope comprising:
  • a cantilever (2) having a probe (1) in an end portion thereof consisting primarily of a lightpropagating medium having an optical opening for passing light, said optical opening forming a sharp front end;
  • a light-transmitting device (6) having a light-transmitting optical opening in both ends thereof, wherein one of said ends of said light-transmitting device is disposed close to a back surface of said probe (1);
  • a light source (10) and optics (11, 12) for generating a light to measure a feature of the sample (13) and for directing generated light to the sample (13);
  • a photoelectric converter device (7) and optics for receiving light from the sample (13);
  • a deflection-detecting means for optically detecting deflection of said cantilever (2), comprising a light source (3) for generating a laser light for use of deflection-detection; a condenser lens (4) for directing the laser light to a back surface of said cantilever (2); and another photoelectric converter device (5) and optics for detecting reflected light from back surface of said cantilever (2);
  • a motion mechanism (21, 22) for making a relative movement between the sample and said probe; and
  • a gap control means (23) for controlling a distance between the surface of the sample (13) and the sharp front end of said probe (1);    wherein the the probe (1) of the cantilever (2) comprises an overhang portion (43) and the condenser lens (4) directs the laser light to said overhang portion (43).









Search report