Diagnostic method and apparatus for vacuum pumps

(19)

(11)

EP 0 851 127 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	16.06.1999 Bulletin 1999/24

(43)	Date of publication A2:
	01.07.1998 Bulletin 1998/27

(21)	Application number: 97202185.1

(22)	Date of filing: 12.07.1997

(51)	International Patent Classification (IPC)⁶: F04D 27/02, F04D 19/04

(84)	Designated Contracting States:
	AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
	Designated Extension States:
	AL LT LV RO SI

(30)

Priority:

27.12.1996 IT TO961091

(71)	Applicant: VARIAN S.p.A.
	I-10040 Leini (Torino) (IT)

(72)	Inventor:
	De Simon, Mauro 33010 Osoppo (Udine) (IT)

(74)	Representative: Robba, Pierpaolo et al
	Interpatent, Via Caboto 35 10129 Torino 10129 Torino (IT)

(54)	Diagnostic method and apparatus for vacuum pumps

(57) The invention relates to a diagnostic method and apparatus for detecting in advance the wear of rotatable components in vacuum pumps, said pumps comprising gas pumping stages formed by rotor disks (113, 114) secured to a rotatable shaft (123) driven by an electric motor, wherein a warning signal for either a pre-alarm or an alarm wear condition is generated when predetermined wear conditions are reached, by expanding the signal from an accelerometer in contact with the vacuum pump into a Fourier spectrum.

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