AVOIDANCE OF PATTERN SHORTENING BY USING AN OFF AXIS ILLUMINATION WITH TWISTING DIPOLE AND POLARIZING APERTURES - Patent 0852029

(19)

(11)

EP 0 852 029 A1

(12)

(43)	Date of publication:
	08.07.1998 Bulletin 1998/28

(21)	Application number: 96929479.0

(22)	Date of filing: 03.09.1996

(51)

International Patent Classification (IPC):

G03F 7/ 20^{( . )}

H01L 21/ 027^{( . )}

(86)	International application number:
	PCT/IB1996/000971

(87)	International publication number:
	WO 1997/011411 (27.03.1997 Gazette 1997/14)

(84)	Designated Contracting States:
	AT DE FR GB IE IT NL

(30)

Priority:

21.09.1995 US 19950531767

(71)	Applicants:
	SIEMENS AKTIENGESELLSCHAFT 80333 München (DE) KABUSHIKI KAISHA TOSHIBA Kawasaki-shi, Kanagawa-ken 210 (JP)

(72)	Inventors:
	POSCHENRIEDER, Bernhard, L. F-78170 La Celle-Saint-Cloud (FR) SATO, Takashi Fishkill, NY 12523 (US) AZUMA, Tsukasa Shinagawa-Ku, Tokyo 140 (JP)

(74)	Representative: Epping, Wilhelm, Dr.-Ing., et al
	Patentanwalt Postfach 22 13 17 80503 München 80503 München (DE)

(54)	AVOIDANCE OF PATTERN SHORTENING BY USING AN OFF AXIS ILLUMINATION WITH TWISTING DIPOLE AND POLARIZING APERTURES