(19)
(11) EP 0 853 689 A1

(12)

(43) Date of publication:
22.07.1998 Bulletin 1998/30

(21) Application number: 96933698.0

(22) Date of filing: 02.10.1996
(51) International Patent Classification (IPC): 
C30B 29/ 36( . )
 C30B 23/ 02( . )
(86) International application number:
PCT/SE1996/001231
(87) International publication number:
WO 1997/013012 (10.04.1997 Gazette 1997/16)
(84) Designated Contracting States:
AT CH DE FI FR GB IT LI SE

(30) Priority: 04.10.1995 SE 19950003427

(71) Applicants:
  • ABB RESEARCH LTD.
    8050 Zürich (CH)
  • Okmetic Limited
    2631 Espoo (FI)

(72) Inventors:
  • KORDINA, Olle
    S-590 52 Sturefors (SE)
  • HALLIN, Christer
    S-583 31 Linköping (SE)
  • JANZEN, Erik
    S-590 30 Borensberg (SE)
  • VEHANEN, Asko
    FIN-02130 Espoo (FI)
  • YAKIMOVA, Rositza
    S-583 30 Linköping (SE)
  • TUOMINEN, Marko
    S-582 51 Linköping (SE)

(74) Representative: Olsson, Jan, et al 
Bjerkéns Patentbyra KB P.O.Box 1274
801 37 Gävle
801 37 Gävle (SE)

   


(54) A METHOD FOR EPITAXIALLY GROWING OBJECTS AND A DEVICE FOR SUCH A GROWTH