FORMATION OF SOURCE/DRAIN FROM DOPED GLASS - Patent 0853815

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EP 0 853 815 A1

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(43)	Date of publication:
	22.07.1998 Bulletin 1998/30

(21)	Application number: 96934065.0

(22)	Date of filing: 03.10.1996

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International Patent Classification (IPC):

H01L 21/ 225^{( . )}
H01L 21/ 8238^{( . )}
H01L 29/ 78^{( . )}

H01L 21/ 336^{( . )}
H01L 27/ 092^{( . )}

(86)	International application number:
	PCT/US1996/016002

(87)	International publication number:
	WO 1997/013273 (10.04.1997 Gazette 1997/16)

(84)	Designated Contracting States:
	DE FR GB IE IT

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Priority:

04.10.1995 US 19950538846

(71)	Applicant: INTEL CORPORATION
	Santa Clara, CA 95052 (US)

(72)	Inventors:
	THOMPSON, Scott, E. Portland, OR 97229 (US) JAN, Chia-Hong Hillsboro, OR 97124 (US) PACKAN, Paul, A. Beaverton, OR 97007 (US) GHANI, Tahir Hillsboro, OR 97124 (US) ANDIDEH, Ebrahim Hillsboro, OR 97124 (US) MOGHADAM, Farhad, K. Los Gatos, CA 95030 (US) BOHR, Mark, T. Aloha, OR 97007 (US)

(74)	Representative: Wombwell, Francis
	Potts, Kerr & Co. 15, Hamilton Square Birkenhead Merseyside L41 6BR Birkenhead Merseyside L41 6BR (GB)

(54)	FORMATION OF SOURCE/DRAIN FROM DOPED GLASS