(19)

(11)

EP 0 853 818 A1

(12)

(43) Date of publication: 22.07.1998 Bulletin 1998/30 (21) Application number: 96927387.0 (22) Date of filing: 15.08.1996

(51) International Patent Classification (IPC):  H01L 29/ 10( . ) H01L 29/ 423( . ) H01L 29/ 78( . ) (86) International application number: PCT/US1996/013039 (87) International publication number: WO 1997/007548 (27.02.1997 Gazette 1997/10)

(84) Designated Contracting States: DE FR GB IT NL (30) Priority: 21.08.1995 US 19950537156 (71) Applicant: SILICONIX Incorporated Santa Clara California 95054 (US)	(72) Inventors: PITZER, Dorman, C. San Ramon, CA 94583 (US) HSHIEH, Fwu-Iuan Saratoga, CA 95070 (US) CHANG, Mike, F. Cupertino, CA 95014 (US) (74) Representative: Kolb, Georg  Daimler-Benz AG, Postfach 35 35 74025 Heilbronn 74025 Heilbronn (DE)