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(11)

EP 0 853 840 A1

(12)

(43) Date of publication: 22.07.1998 Bulletin 1998/30 (21) Application number: 96934983.0 (22) Date of filing: 01.10.1996

(51) International Patent Classification (IPC):  H01L 21/ 822( . ) H01L 27/ 04( . ) H01L 21/ 82( . ) H03K 19/ 177( . ) (86) International application number: PCT/GB1996/002461 (87) International publication number: WO 1997/013324 (10.04.1997 Gazette 1997/16)

(84) Designated Contracting States: DE FR GB (30) Priority: 30.09.1995 GB 19950020027 30.09.1995 GB 19950020026 (71) Applicant: Motorola Inc. Phoenix, AZ 85018 (US)

(72) Inventors: MAY, Roger Cheshire CW10 9HR (GB) DEWHURST, Andrew Cheshire CW10 0PP (GB) BEAVIS, Stephen, Charles Stoke-on-Trent ST7 2QN (GB) BONWICK, Paul, Robert Cheshire CW9 5PW (GB) ROSE, Adam, David Manchester M7 2ES (GB) WORK, Gordon, Stirling Warrington WA4 2SJ (GB) BARTON, Ian, Chalmers Cheshire CW8 4AX (GB) (74) Representative: Williamson, Simeon, et al  Motorola European Intellectual Property Operations Midpoint Alencon Link Basingstoke, Hampshire RG21 7PL Basingstoke, Hampshire RG21 7PL (GB)