(19)
(11) EP 0 854 024 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
28.10.1998 Bulletin 1998/44

(43) Date of publication A2:
22.07.1998 Bulletin 1998/30

(21) Application number: 98300355.9

(22) Date of filing: 19.01.1998
(51) International Patent Classification (IPC)6: B29C 41/08
(84) Designated Contracting States:
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 20.01.1997 JP 7419/97

(71) Applicants:
  • Agency of Industrial Science and Technology of Ministry of International Trade and Industry
    Chiyoda-ku Tokyo (JP)
  • Dainichiseika Color & Chemicals Mfg. Co., Ltd.
    Chuo-ku, Tokyo 103 (JP)
  • Hiraga, Takashi
    Tsukuba-shi, Ibaraki-ken (JP)
  • Moriya, Tetsuo
    Tsukuba-shi, Ibaraki-ken (JP)

(72) Inventors:
  • Hiraga, Takashi
    Tsukuba-shi, Ibaraki-ken (JP)
  • Moriya, Tetsuo
    Tsukuba-shi, Ibaraki-ken (JP)
  • Tanaka, Norio
    Adachi-ku, Tokyo (JP)
  • Yanagimoto, Hiromitsu
    Adachi-ku, Tokyo (JP)

(74) Representative: Smith, Norman Ian et al
fJ CLEVELAND 40-43 Chancery Lane
London WC2A 1JQ
London WC2A 1JQ (GB)

   


(54) Thin-film fabrication method and apparatus


(57) A thin-film fabrication method includes a spray step in which at least one thin-film composition material in liquid form is sprayed into a vacuum vessel via a spray nozzle provided for each thin-film composition material and deposited on a substrate, and a heat treatment step in which the material deposited on the substrate is heat treated. The substrate temperature in the spray step and/or the heat treatment step is controlled within a prescribed temperature range.






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