WATER-PROCESSABLE, CHEMICALLY AMPLIFIED RESIST COMPOSITIONS AND PROCESSES - Patent 0855050

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EP 0 855 050 A1

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(43)	Date of publication:
	29.07.1998 Bulletin 1998/31

(21)	Application number: 96931943.0

(22)	Date of filing: 11.10.1996

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International Patent Classification (IPC):

G03F 7/ 038^{( . )}

G03F 7/ 004^{( . )}

(86)	International application number:
	PCT/IB1996/001082

(87)	International publication number:
	WO 1997/014079 (17.04.1997 Gazette 1997/17)

(84)	Designated Contracting States:
	CH DE FR LI NL

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Priority:

13.10.1995 GB 19950020950

(71)	Applicant: MARTINEX R & D INC.
	Montréal, Québec H3A 2A5 (CA)

(72)	Inventors:
	DARLING, Joseph, Graham, Davidson Ottawa, Ontario K1V 6X6 (CA) VEKSELMAN, Alexander, Maxovitch Montreal, Quebec H3W 1R1 (CA)

(74)	Representative: Seaborn, George Stephen
	c/o Edward Evans & Co. Chancery House 53-64 Chancery Lane London WC2A 1SD London WC2A 1SD (GB)

(54)	WATER-PROCESSABLE, CHEMICALLY AMPLIFIED RESIST COMPOSITIONS AND PROCESSES