| (19) |
 |
|
(11) |
EP 0 860 608 A3 |
| (12) |
EUROPEAN PATENT APPLICATION |
| (88) |
Date of publication A3: |
|
13.10.1999 Bulletin 1999/41 |
| (43) |
Date of publication A2: |
|
26.08.1998 Bulletin 1998/35 |
| (22) |
Date of filing: 23.02.1998 |
|
| (51) |
International Patent Classification (IPC)6: F04B 43/02 |
|
| (84) |
Designated Contracting States: |
|
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
24.02.1997 JP 55506/97
|
| (71) |
Applicant: EBARA CORPORATION |
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Ohta-ku,
Tokyo (JP) |
|
| (72) |
Inventors: |
|
- Horie, Kuniaki
Yamato-shi,
Kanagawa-ken (JP)
- Fukunaga, Yukio
Yokohama-shi,
Kanagawa-ken (JP)
- Hongo, Akihisa
Yokohama-shi,
Kanagawa-ken (JP)
|
| (74) |
Representative: Wagner, Karl H., Dipl.-Ing. et al |
|
WAGNER & GEYER
Patentanwälte
Gewürzmühlstrasse 5
80538 München
80538 München (DE) |
|
| |
|
| (54) |
Diaphragm pump based liquid transport apparatus |
(57) A liquid transport apparatus can operate without having an object liquid directly
contacting sliding sections, so that it can prevent particle contamination of the
object liquid to assure delivery of a clean liquid feed to a subsequent processing
station. The apparatus comprises a fixed wall having a liquid flow hole; a deformable
wall for defining an object liquid space with a variable volume in conjunction with
the fixed wall; and a driver device for generating a controlled movement of the deformable
wall.