(19)

(11)

EP 0 865 577 A1

(12)

(43) Date of publication: 23.09.1998 Bulletin 1998/39 (21) Application number: 95940361.0 (22) Date of filing: 07.12.1995

(51) International Patent Classification (IPC):  F04D 29/ 22( . ) F04D 29/ 68( . ) F04D 29/ 28( . ) (86) International application number: PCT/GB1995/002904 (87) International publication number: WO 1997/021035 (12.06.1997 Gazette 1997/25)

(84) Designated Contracting States: CH DE DK FR GB IT LI NL SE (71) Applicants: EBARA CORPORATION Ohta-ku Tokyo 144 (JP) Ebara Research Co., Ltd. Fujisawa-shi, Kanagawa-ken 251 (JP) UNIVERSITY COLLEGE LONDON London WC1E 7JE (GB)	(72) Inventors: GOTO, Akira Fujisawa-shi, Kanagawa-ken 251 (JP) ZANGENEH, Mehrdad London N6 5PY (GB) HARADA, Hideomi Fujisawa-shi, Kanagawa-ken 251 (JP) (74) Representative: Jackson, Peter Arthur  GILL JENNINGS & EVERY Broadgate House 7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)