METHOD OF FORMING DIELECTRIC FILMS WITH REDUCED METAL CONTAMINATION - Patent 0867037

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EP 0 867 037 A1

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(43)	Date of publication:
	30.09.1998 Bulletin 1998/40

(21)	Application number: 96943723.0

(22)	Date of filing: 11.12.1996

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International Patent Classification (IPC):

H01L 21/ 31^{( . )}
C23C 16/ 452^{( . )}

C23C 16/ 44^{( . )}
H01L 21/ 316^{( . )}

(86)	International application number:
	PCT/US1996/019819

(87)	International publication number:
	WO 1997/022992 (26.06.1997 Gazette 1997/27)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

15.12.1995 US 19950573318

(71)	Applicant: WATKINS-JOHNSON COMPANY
	Palo Alto California 94304 (US)

(72)	Inventor:
	CARVALHEIRA, Helder, Rodrigues San Lorenzo, CA 94580 (US)

(74)	Representative: McLeish, Nicholas Alistair Maxwell, et al
	Boult Wade Tennant 27 Furnival Street London EC4A 1PQ London EC4A 1PQ (GB)

(54)	METHOD OF FORMING DIELECTRIC FILMS WITH REDUCED METAL CONTAMINATION