(19)
(11) EP 0 867 649 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
19.05.1999 Bulletin 1999/20

(43) Date of publication A2:
30.09.1998 Bulletin 1998/40

(21) Application number: 98104872.1

(22) Date of filing: 18.03.1998
(51) International Patent Classification (IPC)6: F16K 23/00, B05B 1/28
(84) Designated Contracting States:
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 25.03.1997 JP 72435/97

(71) Applicant: SMC Kabushiki Kaisha
Minato-ku, Tokyo 105-8659 (JP)

(72) Inventors:
  • Fukano, Yoshihiro, c/o SMC Kabushiki Kaisha
    Tsukuba-gun, Ibaraki-ken, 300-24 (JP)
  • Maruyama, Tetsuro, c/o SMC Kabushiki Kaisha
    Tsukuba-gun, Ibaraki-ken, 300-24 (JP)

(74) Representative: KEIL & SCHAAFHAUSEN Patentanwälte 
Eysseneckstrasse 31
60322 Frankfurt am Main
60322 Frankfurt am Main (DE)

   


(54) Suck back valve


(57) A suck back valve is proposed, comprising a suck back mechanism (28) for sucking a coating liquid inside a fluid passage (38) under a negative pressure action of a diaphragm displaced by a pilot pressure, an ON/OFF valve (26) for opening and closing the fluid passage (38) under action of the pilot pressure, and a flow amount control device (115) for controlling the pilot pressure supplied to the ON/OFF valve (26).






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