(19)
(11) EP 0 867 952 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.05.2003 Bulletin 2003/22

(45) Mention of the grant of the patent:
25.09.2002 Bulletin 2002/39

(21) Application number: 98105408.3

(22) Date of filing: 25.03.1998
(51) International Patent Classification (IPC)7: H01L 41/24, C23C 18/12

(54)

Process of producing a piezoelectric element

Verfahren zur Herstellung eines piezoelektrischen Elements

Procédé de fabrication d'élément piézoélectrique

(84) Designated Contracting States:
DE FR GB IT NL SE

(30) Priority: 27.03.1997 JP 7624697
21.08.1997 JP 22515697

(43) Date of publication of application:
30.09.1998 Bulletin 1998/40

(60) Divisional application:
01114232.0 / 1179861

(73) Proprietor: SEIKO EPSON CORPORATION
Shinjuku-ku, Tokyo (JP)

(72) Inventors:
  • QIU, Hong
    Suwa-shi, Nagano-ken (JP)
  • Moriya, Soichi
    Suwa-shi, Nagano-ken (JP)
  • Kamei, Hiroyuki
    Suwa-shi, Nagano-ken (JP)
  • Sumi, Koji
    Suwa-shi, Nagano-ken (JP)
  • Murai, Masami
    Suwa-shi, Nagano-ken (JP)
  • Nishiwaki, Tsutomu
    Suwa-shi, Nagano-ken (JP)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)


(56) References cited: : 
EP-A- 0 727 832
   
  • OTHMAN M B ET AL: "A novel process for alkoxide-derived PZT thin films with multi-seeding layers" ISAF '96. PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (CAT. NO.96CH35948), ISAF '96. PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, EAST BRUNSWICK, NJ, USA, 18-21 A, ISBN 0-7803-3355-1, 1996, NEW YORK, NY, USA, IEEE, USA, pages 731-734 vol.2, XP002070778
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).