(19)

(11)

EP 0 868 685 A1

(12)

(43) Date of publication: 07.10.1998 Bulletin 1998/41 (21) Application number: 96943815.0 (22) Date of filing: 18.12.1996

(51) International Patent Classification (IPC):  G03F 7/ 004( . ) H05K 3/ 28( . ) G03F 7/ 038( . ) (86) International application number: PCT/US1996/020268 (87) International publication number: WO 1997/022910 (26.06.1997 Gazette 1997/27)

(84) Designated Contracting States: BE DE FR GB (30) Priority: 21.12.1995 US 19950009023P (71) Applicant: THE DOW CHEMICAL COMPANY Midland, Michigan 48674 (US)	(72) Inventors: SO, Ying, H. Midland, MI 48640 (US) DARBY, Nicholas Midland, MI 48640 (US) WARREN, Malcolm, W. Midland, MI 48642 (US) SCHMIDT, Donald, L. Midland, MI 48640 (US) ROSE, Gene, D. Midland, MI 48642 (US) (74) Representative: Raynor, John, et al  W.H. Beck, Greener & Co 7 Stone Buildings Lincoln's Inn London WC2A 3SZ London WC2A 3SZ (GB)