(19)
(11) EP 0 873 430 A1

(12)

(43) Date of publication:
28.10.1998 Bulletin 1998/44

(21) Application number: 97933336.0

(22) Date of filing: 17.07.1997
(51) International Patent Classification (IPC): 
C23C 14/ 34( . )
H01L 21/ 285( . )
 H01J 37/ 34( . )
H01L 21/ 31( . )
(86) International application number:
PCT/US1997/011916
(87) International publication number:
WO 1998/002597 (22.01.1998 Gazette 1998/03)
(84) Designated Contracting States:
DE GB

(30) Priority: 17.07.1996 US 19960684440

(71) Applicant: Novellus Systems, Inc.
San Jose, CA 95134 (US)

(72) Inventor:
  • ANDERSON, Richard, L.
    Palo Alto, CA 94306 (US)

(74) Representative: Reinhard - Skuhra - Weise & Partner 
Friedrichstrasse 31
80801 München
80801 München (DE)

   


(54) SPUTTERING DEVICE AND LIQUID-COOLED TARGET ASSEMBLY THEREFOR