SEMICONDUCTOR DEVICES, AND METHODS FOR SAME - Patent 0875074

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EP 0 875 074 A1

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(43)	Date of publication:
	04.11.1998 Bulletin 1998/45

(21)	Application number: 97902033.0

(22)	Date of filing: 16.01.1997

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International Patent Classification (IPC):

H01L 29/ 78^{( . )}
H01L 21/ 30^{( . )}
H01L 29/ 51^{( . )}

H01L 21/ 28^{( . )}
H01L 21/ 324^{( . )}

(86)	International application number:
	PCT/US1997/000629

(87)	International publication number:
	WO 1997/026676 (24.07.1997 Gazette 1997/32)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

16.01.1996 US 19960586411

(71)	Applicant: The Board of Trustees for the University of Illinois
	Urbana, Illinois 61801 (US)

(72)	Inventors:
	LYDING, Joseph, W. Champaign, IL 61821 (US) HESS, Karl Champaign, IL 61821 (US)

(74)	Representative: Holmes, Matthew Peter, et al
	MARKS & CLERK, Sussex House, 83-85 Mosley Street Manchester M2 3LG Manchester M2 3LG (GB)

(54)	SEMICONDUCTOR DEVICES, AND METHODS FOR SAME