(19)

(11)

EP 0 878 023 A1

(12)

(43) Date of publication: 18.11.1998 Bulletin 1998/47 (21) Application number: 97901650.0 (22) Date of filing: 30.01.1997

(51) International Patent Classification (IPC):  H01L 21/ 60( . ) H01L 23/ 485( . ) (86) International application number: PCT/FI1997/000047 (87) International publication number: WO 1997/028562 (07.08.1997 Gazette 1997/34)

(84) Designated Contracting States: DE FI FR NL (30) Priority: 02.02.1996 FI 19960000502 (71) Applicant: PICOPAK OY 08150 Lohja (FI)	(72) Inventor: AINTILA, Ahti FIN-08100 Lohja (FI) (74) Representative: Lipsanen, Jari Seppo Einari, et al  Seppo Laine Oy, Itämerenkatu 3 B 00180 Helsinki 00180 Helsinki (FI)