METHOD FOR PRODUCING NEAR NET SHAPE PLANAR SPUTTERING TARGETS AND AN INTERMEDIATE THEREFOR - Patent 0885079

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EP 0 885 079 A1

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(43)	Date of publication:
	23.12.1998 Bulletin 1998/52

(21)	Application number: 97906532.0

(22)	Date of filing: 13.02.1997

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International Patent Classification (IPC):

B22F 7/ 08^{( . )}

C23C 14/ 34^{( . )}

(86)	International application number:
	PCT/US1997/002060

(87)	International publication number:
	WO 1997/031739 (04.09.1997 Gazette 1997/38)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

03.03.1996 US 19960012942P

(71)	Applicant: TOSOH SMD, INC.
	Grove City, Ohio 43123-1895 (US)

(72)	Inventor:
	STELLRECHT, David, E. Columbus, OH 43212 (US)

(74)	Representative: Johnstone, Douglas Ian, et al
	Baron & Warren, 18 South End Kensington, London W8 5BU Kensington, London W8 5BU (GB)

(54)	METHOD FOR PRODUCING NEAR NET SHAPE PLANAR SPUTTERING TARGETS AND AN INTERMEDIATE THEREFOR