(19)
(11)
EP 0 888 622 A1
(12)
(43)
Date of publication:
07.01.1999
Bulletin 1999/01
(21)
Application number:
97907280.0
(22)
Date of filing:
12.03.1997
(51)
International Patent Classification (IPC):
G21F
7/
005
( . )
(86)
International application number:
PCT/JP1997/000772
(87)
International publication number:
WO 1997/034305
(
18.09.1997
Gazette 1997/40)
(84)
Designated Contracting States:
DE FR GB IT
(30)
Priority:
12.03.1996
JP 19960081905
12.03.1996
JP 19960081906
(71)
Applicant:
EBARA CORPORATION
Ohta-ku Tokyo 144 (JP)
(72)
Inventors:
IIZUKA, Yoshitaka
Ohta-ku, Tokyo 144 (JP)
IZUTSU, Masahiro
Ohta-ku, Tokyo 144 (JP)
(74)
Representative:
Wagner, Karl H., Dipl.-Ing.
WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5
80538 München
80538 München (DE)
(54)
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