(19)
(11) EP 0 890 191 A1

(12)

(43) Date of publication:
13.01.1999 Bulletin 1999/02

(21) Application number: 97915821.0

(22) Date of filing: 26.03.1997
(51) International Patent Classification (IPC): 
H01L 21/ 331( . )
H01L 29/ 10( . )
H01L 29/ 06( . )
H01L 29/ 739( . )
(86) International application number:
PCT/SE1997/000531
(87) International publication number:
WO 1997/036329 (02.10.1997 Gazette 1997/42)
(84) Designated Contracting States:
DE FR GB IT SE

(30) Priority: 27.03.1996 SE 19960001172

(71) Applicant: ABB RESEARCH LTD.
8050 Zürich (CH)

(72) Inventors:
  • HARRIS, Christopher
    S-191 72 Sollentuna (SE)
  • BAKOWSKI, Mietek
    S-730 50 Skultuna (SE)
  • GUSTAFSSON, Ulf
    S-582 61 Linköping (SE)

(74) Representative: Olsson, Jan 
Bjerkéns Patentbyra KB P.O.Box 1274
801 37 Gävle
801 37 Gävle (SE)

   


(54) INSULATED GATE BIPOLAR TRANSISTOR HAVING A TRENCH AND A METHOD FOR PRODUCTION THEREOF