(19)
(11) EP 0 894 349 A1

(12)

(43) Date of publication:
03.02.1999 Bulletin 1999/05

(21) Application number: 98906461.0

(22) Date of filing: 17.02.1998
(51) International Patent Classification (IPC): 
H01S 3/ 097( . )
H02M 9/ 04( . )
H03K 17/ 80( . )
 H01S 3/ 0971( . )
H03K 3/ 57( . )
H01S 5/ 042( . )
(86) International application number:
PCT/US1998/002941
(87) International publication number:
WO 1998/037602 (27.08.1998 Gazette 1998/34)
(84) Designated Contracting States:
BE DE ES FR GB IT LU NL

(30) Priority: 21.02.1997 US 19970803890

(71) Applicant: Cymer, Inc.
San Diego, CA 92127-1712 (US)

(72) Inventors:
  • Partlo, William N.
    San Diego, CA 92128 (US)
  • Sandstrom, Richard L.
    Encinitas, CA 92024 (US)
  • Birx, Daniel L.
    175D, Oakley, CA 94561 (US)
  • Ness, Richard Mons
    San Diego, CA 92126 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) METHOD AND APPARATUS FOR ELIMINATING REFLECTED ENERGY DUE TO STAGE MISMATCH IN NONLINEAR MAGNETIC COMPRESSION MODULE