(19)
(11) EP 0 895 649 A1

(12)

(43) Date of publication:
10.02.1999 Bulletin 1999/06

(21) Application number: 97950454.0

(22) Date of filing: 29.12.1997
(51) International Patent Classification (IPC): 
H01J 9/ 14( . )
H01J 9/ 38( . )
(86) International application number:
PCT/KR1997/000280
(87) International publication number:
WO 1998/029892 (09.07.1998 Gazette 1998/27)
(84) Designated Contracting States:
DE

(30) Priority: 30.12.1996 KR 19960064424
27.06.1997 KR 19970028477
27.06.1997 KR 19970028478

(71) Applicant: SAMSUNG DISPLAY DEVICES CO., LTD.
Suwon-city, Kyungki-do 442-390 (KR)

(72) Inventors:
  • CHO, Sheung, Ihn Samsung 3rd Apt.
    Kyungki-do 442-374 (KR)
  • YEOM, Jae, Bong Yukseong Villa
    Kyungki-do 441-110 (KR)
  • JANG, Chang, Hee 17-2, 7, 6-ga
    Seoul 150-046 (KR)
  • YOON, Hyung, S. Yoowon Jeil Apt. 4-1005
    Seoul 150-044 (KR)

(74) Representative: Kopecky, Helmut, Dipl.-Ing. Kopecky & Schwarz Patentanwälte, et al 
Wipplingerstrasse 32/22
1010 Wien
1010 Wien (AT)

   


(54) METHOD AND APPARATUS FOR REMOVING DUST FROM SHADOW MASK