(19)

(11)

EP 0 896 730 A1

(12)

(43) Date of publication: 17.02.1999 Bulletin 1999/07 (21) Application number: 97923607.0 (22) Date of filing: 05.05.1997

(51) International Patent Classification (IPC):  H01J 1/ 30( . ) H01J 29/ 06( . ) H01J 31/ 12( . ) H01J 1/ 304( . ) H01J 29/ 96( . ) (86) International application number: PCT/US1997/007855 (87) International publication number: WO 1997/042644 (13.11.1997 Gazette 1997/49)

(84) Designated Contracting States: AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 03.05.1996 US 19960642398 (71) Applicant: Micron Technology, Inc. Boise, ID 83706-0006 (US)	(72) Inventors: XIA, Zhongyi Boise, ID 83706 (US) WESTPHAL, Michael, J. Boise, ID 83705 (US) LEE, John, K. Meridian, ID 83642 (US) BROWNING, Jim, J. Boise, ID 83706 (US) (74) Representative: Klunker . Schmitt-Nilson . Hirsch  Winzererstrasse 106 80797 München 80797 München (DE)