INSPECTION EQUIPMENT USING SMALL-ANGLE TOPOGRAPHY IN DETERMINING AN OBJECT'S INTERNAL STRUCTURE AND COMPOSITION - Patent 0898704

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EP 0 898 704 A1

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(43)	Date of publication:
	03.03.1999 Bulletin 1999/09

(21)	Application number: 98902696.0

(22)	Date of filing: 23.01.1998

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International Patent Classification (IPC):

G01N 23/ 201^{( . )}
G01V 5/ 00^{( . )}

G01N 23/ 04^{( . )}

(86)	International application number:
	PCT/US1998/001299

(87)	International publication number:
	WO 1998/033062 (30.07.1998 Gazette 1998/30)

(84)	Designated Contracting States:
	AT BE DE ES FR GB GR IE IT NL SE

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Priority:

24.01.1997 RU 19970101221
08.04.1997 RU 19970105594

(71)	Applicant: Quanta Vision, Inc.
	San Mateo, CA 94402 (US)

(72)	Inventors:
	KOMARDIN, Oleg V. Moscow (RU) LAWRENCE, Albert, F. Escondida, CA 92026 (US) LAZAREV, Pavel, I. Menlo Park, CA 94025 (US)

(74)	Representative: Freeman, Jacqueline Carol
	W.P. THOMPSON & CO. Celcon House 289-293 High Holborn London WC1V 7HU London WC1V 7HU (GB)

(54)	INSPECTION EQUIPMENT USING SMALL-ANGLE TOPOGRAPHY IN DETERMINING AN OBJECT'S INTERNAL STRUCTURE AND COMPOSITION