PROCESS TO MODIFY WORK FUNCTIONS USING ION IMPLANTATION - Patent 0904159

(19)

(11)

EP 0 904 159 A1

(12)

(43)	Date of publication:
	31.03.1999 Bulletin 1999/13

(21)	Application number: 97922305.0

(22)	Date of filing: 28.03.1997

(51)

International Patent Classification (IPC):

B05D 7/ 00^{( . )}
C23C 14/ 58^{( . )}
H01J 9/ 02^{( . )}

C23C 14/ 48^{( . )}
H01J 1/ 304^{( . )}
H01L 21/ 265^{( . )}

(86)	International application number:
	PCT/US1997/006168

(87)	International publication number:
	WO 1997/036693 (09.10.1997 Gazette 1997/43)

(84)	Designated Contracting States:
	FR

(30)

Priority:

01.04.1996 US 19960625259

(71)	Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
	Oakland, California 94612-3550 (US)

(72)	Inventors:
	MUSKET, Ronald, G. Danville, CA 94506 (US) BALOOCH, Medhi Berkeley, CA 94707 (US) SIEKHAUS, Wigbert, J. Berkeley, CA 94708 (US)

(74)	Representative: Baillie, Iain Cameron
	Ladas & Parry, Altheimer Eck 2 80331 München 80331 München (DE)

(54)	PROCESS TO MODIFY WORK FUNCTIONS USING ION IMPLANTATION