(19)
(11) EP 0 908 930 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
25.03.2009 Bulletin 2009/13

(45) Mention of the grant of the patent:
12.11.2008 Bulletin 2008/46

(21) Application number: 98119271.9

(22) Date of filing: 13.10.1998
(51) International Patent Classification (IPC): 
H01L 21/00(2006.01)
 F16K 27/00(2006.01)

(54)

Fluid control apparatus

Flüssigkeitssteuerungseinrichtung

Dispositif de commande de fluide

(84) Designated Contracting States:
CH DE FR GB IT LI NL

(30) Priority: 13.10.1997 JP 27849597

(43) Date of publication of application:
14.04.1999 Bulletin 1999/15

(73) Proprietors:
  • TADAHIRO OHMI
    Sendai-shi, Miyagi-ken (JP)
  • Fujikin Incorporated
    Osaka (JP)

(72) Inventors:
  • Tadahiro Ohmi,
    Sendai-shi, Miyagi (JP)
  • Michio, Yamaji, c/o Fujikin Incorporated
    Osaka-shi, Osaka (JP)
  • Naoya, Masuda, c/o Fujikin Incorporated
    Osaka-shi, Osaka (JP)
  • Takashi, Hirose c/o Fujikin Incorporated
    Osaka-shi, Osaka (JP)
  • Kosuke, Yokoyama, c/o Fujikin Incorporated
    Osaka-shi, Osaka (JP)
  • Nobukazu, Ikeda, c/o Fujikin Incorporated
    Osaka-shi, Osaka (JP)

(74) Representative: Paul, Dieter-Alfred et al
Paul & Albrecht Patentanwaltssozietät Hellersbergstrasse 18
41460 Neuss
41460 Neuss (DE)


(56) References cited: : 
EP-A- 0 366 281
EP-A- 0 754 896
GB-A- 1 533 202
US-A- 4 524 807
 EP-A- 0 585 692
EP-A- 0 845 623
US-A- 3 654 960
   
  • PATENT ABSTRACTS OF JAPAN vol. 018, no. 628 (M-1713), 30 November 1994 (1994-11-30) -& JP 06 241400 A (TOSHIBA CORP;OTHERS: 01), 30 August 1994 (1994-08-30)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).