METHOD FOR SIMPLIFYING THE MANUFACTURE OF AN INTERLAYER DIELECTRIC STACK - Patent 0909461

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EP 0 909 461 A1

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(43)	Date of publication:
	21.04.1999 Bulletin 1999/16

(21)	Application number: 97915877.0

(22)	Date of filing: 07.03.1997

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International Patent Classification (IPC):

H01L 21/ 768^{( . )}

(86)	International application number:
	PCT/US1997/003552

(87)	International publication number:
	WO 1998/000863 (08.01.1998 Gazette 1998/01)

(84)	Designated Contracting States:
	DE FR GB NL

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Priority:

01.07.1996 US 19960673005

(71)	Applicant: ADVANCED MICRO DEVICES INC.
	Sunnyvale, California 94088-3453 (US)

(72)	Inventor:
	KEPLER, Nick San Jose, CA 95129 (US)

(74)	Representative: Sanders, Peter Colin Christopher
	BROOKES & MARTIN High Holborn House 52/54 High Holborn London WC1V 6SE London WC1V 6SE (GB)

(54)	METHOD FOR SIMPLIFYING THE MANUFACTURE OF AN INTERLAYER DIELECTRIC STACK