SENSORS AND METHODS OF MAKING WAFER SENSORS - Patent 0917717

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EP 0 917 717 A1

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(43)	Date of publication:
	26.05.1999 Bulletin 1999/21

(21)	Application number: 97931199.0

(22)	Date of filing: 17.06.1997

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International Patent Classification (IPC):

H01C 7/ 04^{( . )}

(86)	International application number:
	PCT/US1997/010406

(87)	International publication number:
	WO 1997/049104 (24.12.1997 Gazette 1998/03)

(84)	Designated Contracting States:
	AT BE DE DK ES FI FR GB IE IT NL PT SE

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Priority:

17.06.1996 US 19960019973P

(71)	Applicant: Thermometrics, Inc.
	Edison, NJ 08817-4695 (US)

(72)	Inventors:
	ROSEN, Carol, Zwick Teaneck, NJ 07666 (US) WICKHAM, Donald, G. Malibu, CA 90265 (US) CARTER, John, Jr. St. Mary's, PA 15857 (US) SORG, David St. Mary's, PA 15857 (US)

(74)	Representative: Harrison, Michael Charles, et al
	Albihns GmbH, Grasserstrasse 10 80339 München 80339 München (DE)

(54)	SENSORS AND METHODS OF MAKING WAFER SENSORS