(19)

(11)

EP 0 918 593 A1

(12)

(43) Date of publication: 02.06.1999 Bulletin 1999/22 (21) Application number: 97926131.0 (22) Date of filing: 16.06.1997

(51) International Patent Classification (IPC):  B23Q 5/ 28( . ) B23Q 1/ 00( . ) B23Q 5/ 027( . ) B24B 13/ 00( . ) H01L 41/ 04( . ) H02N 2/ 02( . ) B23B 5/ 36( . ) B23Q 1/ 34( . ) B24B 1/ 04( . ) F16H 21/ 02( . ) H01L 41/ 09( . ) (86) International application number: PCT/GB1997/001621 (87) International publication number: WO 1997/048521 (24.12.1997 Gazette 1998/03)

(84) Designated Contracting States: CH DE GB IT LI NL (30) Priority: 17.06.1996 GB 19960012614 (71) Applicant: TAYLOR HOBSON LIMITED Leicester LE4 9JQ (GB)	(72) Inventors: PAIGE, Nicholas Springfield, VT 05156 (US) MCCAVANA, Gerard Hayward, CA 94545 (US) (74) Representative: Beresford, Keith Denis Lewis, et al  BERESFORD & Co. 2-5 Warwick Court High Holborn London WC1R 5DJ London WC1R 5DJ (GB)