Self-assembling micro-mechanical device

(19)

(11)

EP 0 924 763 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	14.07.1999 Bulletin 1999/28

(43)	Date of publication A2:
	23.06.1999 Bulletin 1999/25

(21)	Application number: 98310061.1

(22)	Date of filing: 08.12.1998

(51)	International Patent Classification (IPC)⁶: H01L 25/00, H01L 23/13, H01L 21/98, G02B 26/00

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
	Designated Extension States:
	AL LT LV MK RO SI

(30)

Priority:

22.12.1997 US 997175

(71)	Applicant: LUCENT TECHNOLOGIES INC.
	Murray Hill, New Jersey 07974-0636 (US)

(72)	Inventors:
	Aksyuk, Vladimir Anatolyevich Piscataway, N.J. 08854 (US) Bishop, David John Summit, N.J. 07901 (US)

(74)	Representative: Watts, Christopher Malcolm Kelway, Dr. et al
	Lucent Technologies (UK) Ltd, 5 Mornington Road Woodford Green Essex, IG8 0TU Woodford Green Essex, IG8 0TU (GB)

(54)	Self-assembling micro-mechanical device

(57) A self-assembling micron-sized mechanical device is described. The device comprises hinged plates attached to a support. A beam having a first end free to move in an upwardly-directed arc is associated with each hinged plate comprising the device. The beam has a first engagement member, including a first angled edge, disposed at its freely-movable first end. Each hinged plate includes a second engagement member, including a second angled edge. In the unassembled state, at least a portion of the first engagement member lies beneath the second engagement member on the support. Actuation force is applied to the beam by an actuator, the force causing the first end of the beam to lift. As it does so, the first and second angled edges slide over another, and the hinged plate is rotated upwardly about its hinges away from the support. The mechanical advantage provided by the angled edges allows a hinged plate to be rotated fully ninety degrees away from the support.

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