INTEGRATED COMPLIANT PROBE FOR WAFER LEVEL TEST AND BURN-IN - Patent 0925510

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EP 0 925 510 A1

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(43)	Date of publication:
	30.06.1999 Bulletin 1999/26

(21)	Application number: 97941594.0

(22)	Date of filing: 12.09.1997

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International Patent Classification (IPC):

G01R 1/ 073^{( . )}
G01R 1/ 067^{( . )}

H01L 21/ 66^{( . )}

(86)	International application number:
	PCT/US1997/016265

(87)	International publication number:
	WO 1998/011446 (19.03.1998 Gazette 1998/11)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

13.09.1996 US 19960026112P

(71)	Applicant: International Business Machines Corporation
	Armonk, N.Y. 10504 (US)

(72)	Inventors:
	BEAMAN, Brian, Samuel Apex, NC 27502 (US) FOGEL, Keith, Edward Mohegan Lake, NY 10547 (US) LAURO, Paul Alfred, Apartment Nanuet, NY 10954 (US) SHIH, Da-Yuan Poughkeepsie, NY 12603 (US)

(74)	Representative: Burt, Roger James, Dr.
	IBM United Kingdom Limited Intellectual Property Department Hursley Park Winchester Hampshire SO21 2JN Winchester Hampshire SO21 2JN (GB)

(54)	INTEGRATED COMPLIANT PROBE FOR WAFER LEVEL TEST AND BURN-IN