(19)
(11) EP 0 928 034 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.05.2003 Bulletin 2003/22

(45) Mention of the grant of the patent:
08.01.2003 Bulletin 2003/02

(21) Application number: 99101631.2

(22) Date of filing: 18.09.1996
(51) International Patent Classification (IPC)7: H01L 41/09, H01L 41/24, B41J 2/045

(54)

Thin piezoelectric film element, process for the preparation thereof and ink jet recording head using thin piezoelectric film element

Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf

Elément à couche mince piézoélectrique, procédé de fabrication, et tête d'enregistrement à jet d'encre utilisant cet élément à couche mince piézoélectrique

(84) Designated Contracting States:
DE FR GB IT

(30) Priority: 19.09.1995 JP 24037295
12.12.1995 JP 32267095
19.07.1996 JP 19084896
17.09.1996 JP 24535396

(43) Date of publication of application:
07.07.1999 Bulletin 1999/27

(62) Application number of the earlier application in accordance with Art. 76 EPC:
96114974.7 / 0764992

(73) Proprietor: SEIKO EPSON CORPORATION
Shinjuku-ku, Tokyo (JP)

(72) Inventors:
  • Shimada, Masato
    Suwa-shi, Nagano-ken (JP)
  • Takahashi, Tetsushi
    Suwa-shi, Nagano-ken (JP)
  • Kamei, Hiroyuki
    Suwa-shi, Nagano-ken (JP)
  • Qiu, Hong
    Suwa-shi, Nagano-ken (JP)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)


(56) References cited: : 
EP-A- 0 656 665
 US-A- 5 198 269
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).