(19)
(11) EP 0 930 166 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
12.04.2000 Bulletin 2000/15

(43) Date of publication A2:
21.07.1999 Bulletin 1999/29

(21) Application number: 98250372.4

(22) Date of filing: 21.10.1998
(51) International Patent Classification (IPC)7B41J 2/14, B41J 2/16
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 21.10.1997 CN 97121346
21.10.1997 CN 97121341
21.10.1997 CN 97121345

(71) Applicant: Microjet Technology Co., Ltd
Hsin Chu (TW)

(72) Inventors:
  • Mou, Tse-Chi
    Hsin Chu (TW)
  • Chang,Yee-Shyi
    Hsin Chu (TW)
  • Yang, Arnold Chang-Mou
    Hsin Chu (TW)
  • Chou,Chin-Yi
    Hsin Chu (TW)
  • Tseng, Kou-Yow
    Hsin Chu (TW)

(74) Representative: UEXKÜLL & STOLBERG 
Patentanwälte Beselerstrasse 4
22607 Hamburg
22607 Hamburg (DE)

   


(54) Manufacturing process and structure of ink jet printhead


(57) A manufacturing process and a structure for an ink jet printhead with high quality, yield rate, and performance are provided. The process includes steps of: a) providing a substrate, b) forming a dielectric layer over the substrate, c) forming a resistor over the dielectric layer, d) forming a conducting layer over a portion of the resistor, e) forming a passivation over a portion of the conducting layer and another portion of the resistor not covered by the conducting layer, f) forming a hole over the passivation for storing an ink, and g) forming a nozzle over the hole for ejecting therethrough the ink.







Search report