(19)

(11)

EP 0 931 353 A1

(12)

(43) Date of publication: 28.07.1999 Bulletin 1999/30 (21) Application number: 97909973.0 (22) Date of filing: 16.10.1997

(51) International Patent Classification (IPC):  H01L 21/ 336( . ) H01L 29/ 78( . ) H01L 29/ 423( . ) (86) International application number: PCT/US1997/017929 (87) International publication number: WO 1998/019344 (07.05.1998 Gazette 1998/18)

(84) Designated Contracting States: AT BE DE FR GB IT NL SE (30) Priority: 25.10.1996 US 19960735909 (71) Applicant: SILICONIX INCORPORATED Santa Clara, CA 95054-0951 (US)	(72) Inventor: WILLIAMS, Richard, K. Cupertino, CA 95014 (US) (74) Representative: Kolb, Georg  DaimlerChrysler AG, Postfach 35 35 74025 Heilbronn 74025 Heilbronn (DE)