(19)
(11) EP 0 931 939 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
30.08.2000 Bulletin 2000/35

(43) Date of publication A2:
28.07.1999 Bulletin 1999/30

(21) Application number: 98111113.1

(22) Date of filing: 17.06.1998
(51) International Patent Classification (IPC)7F04D 19/04, F04D 25/16, F04B 45/047, F04B 37/14, F04B 27/053
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 24.12.1997 IT TO971139

(71) Applicant: VARIAN S.p.A.
I-10040 Leini (Torino) (IT)

(72) Inventors:
  • De Simon, Mauro
    33010 Osoppo (Udine) (IT)
  • Spaziani, Vincenzo
    10142 Torino (IT)

(74) Representative: Robba, Pierpaolo et al
Interpatent, Via Caboto 35
10129 Torino
10129 Torino (IT)

   


(54) Vacuum pump


(57) The invention concerns a vacuum pump (1) for achieving high vacuum conditions comprising a pump casing (5), a first plurality of molecular pumping stages (2) formed by rotor disks (8a,8b) cooperating with stator rings (9a,9b) and housed in a first portion (4a) of said pump casing, and a second plurality of pumping diaphragm stages (3) housed in a second portion (4b) of said pump casing, a first electric motor (13) for driving said rotor disks of the molecular stages, a second electric motor (30) for actuating the diaphragms (40) of the diaphragm stages, and at least a common passage (7) for the passage of the gas discharged from said molecular pumping stages (2) and sucked by said diaphragm pumping stages (3).







Search report