(19)

(11)

EP 0 932 913 A1

(12)

(43) Date of publication: 04.08.1999 Bulletin 1999/31 (21) Application number: 96944775.0 (22) Date of filing: 16.12.1996

(51) International Patent Classification (IPC):  C25D 7/ 12( . ) H01L 21/ 288( . ) H01L 23/ 532( . ) H01L 21/ 28( . ) H01L 21/ 768( . ) (86) International application number: PCT/US1996/019592 (87) International publication number: WO 1998/027585 (25.06.1998 Gazette 1998/25)

(84) Designated Contracting States: DE FR GB IE IT (71) Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION Armonk, NY 10504 (US)

(72) Inventors: ANDRICACOS, Panayotis, Constantinou Croton-on-Hudson, NY 10520 (US) DELIGIANNI, Hariklia Edgewater, NJ 07020 (US) DUKOVIC, John, Owen Pleasantville, NY 10570 (US) HORKANS, Wilma, Jean Ossining, NY 10562 (US) UZOH, Cyprian, Emeka Hopewell Junction, NY 12533 (US) WONG, Kwong, Hon Wappingers Falls, NY 12590 (US) HU, Chao-Kun Somers, NY 10589 (US) EDELSTEIN, Daniel, Charles New Rochelle, NY 10801 (US) RODBELL, Kenneth, Parker Poughquag, NY 12570 (US) HURD, Jeffery, Louis Marlboro, NY 12542 (US) (74) Representative: Ling, Christopher John  IBM United Kingdom Limited, Intellectual Property Department, Hursley Park Winchester, Hampshire SO21 2JN Winchester, Hampshire SO21 2JN (GB)